发明名称 Verfahren zum Beschichten von Folie aus Nickel oder einer Nickellegierung und beschichtete Folie aus Nickel oder einer Nickellegierung
摘要 The invention discloses a method for coating foil comprised of nickel or a nickel alloy by sputtering a layer comprised of a metal compound on the foil in a vacuum. The foil is treated in an argon plasma with a pressure of 1031 3 to 10-2 millibar, for a variable time with a variable rate, and with energy of the plasma ions. A chromium oxide layer or a layer containing chromium oxide is successively sputtered by means of a reactive magnetron atomizing of at least one target comprised of chromium or an alloy containing chromium. The layer is sputtered with at least one atomization source in an argon-oxygen mixture with a pressure of 10-3 to 10-2 millibar. The operating point is constantly maintained in given boundaries and the foil is bonded in a defined thermal contact with a thermal buffer when the foil is being coated. The foil is coated until a given interference color pertaining to an interference of a first or second order is reached on the foil.
申请公布号 DE19800758(C2) 申请公布日期 2000.08.31
申请号 DE1998100758 申请日期 1998.01.12
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN;STORK VECO B.V., EERBEEK 发明人 GOEDICKE, KLAUS;LIEBIG, JOERN-STEFFEN;MALOBABIC, PETER;HOCHREITER, ERWIN;GULIKERS, JOSEPHUS
分类号 B26B21/60;C23C14/00;C23C14/02;C23C14/08;C23C14/34;C23C14/50;C23C14/56;(IPC1-7):C23C14/34;C23C14/54 主分类号 B26B21/60
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