| 摘要 |
PROBLEM TO BE SOLVED: To enable more precise measurement to a specified region of an object to be measured by calculating an inclination angle and three-dimensional position of the specified region of the object to be measured with a simple constitution. SOLUTION: A first luminous flux L1 from a first light source part 2 and a second luminous flux L2 from a second light source part 3 are reflected by a reflecting member 11 arranged on an object A to be measured. The reflected lights are received with a first photo detecting element 12 and a second photo detecting element 13, respectively, and the light receiving regions are detected. From a reflected light of a third luminous flux L3 outputted to the reflecting member 11 vertically from below, inclination angle information about inclination is detected. On the basis of the information, the inclination angle of the object A is calculated. On the basis of the light receiving positions of the photo detecting elements 12, 13 and the inclination angle of the object A, the three- dimensional position of the object A is calculated. As a result, the inclination angle and the three-dimensional position of a specified region of the object A are calculated at the same time with a simple constitution, and more precise measurement to the specified region of the object A is enabled.
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