| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding method and a grinding device capable of obtaining shape accuracy specified in design specifications irrespective of external disturbance factors such as heat and vibration generated inside the device and thermal fluctuation due to changes of atmospheric temperature and fluctuation amount in work stage and tool stage during machining. SOLUTION: Moving amounts in feed directions of a workpiece 3 and a tool 8 are measured in the vicinity of a machining point, a reference point which is not affected by external disturbance components such as vibration and heat generation of the tool 8 and the workpiece 3 is provided to measure relative displacement of the workpiece 3 and the tool 8, and a fluctuation amount of a work stage 5 from the reference point and a fluctuation amount of a tool stage 9 thereform are measured to compensate the moving amounts and feedback to a control system so as to reflect in feed amounts of the workpiece 3 and the tool 8 and improve grinding accuracy.
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