摘要 |
PROBLEM TO BE SOLVED: To stably connect the ground (GND) wire from a lower electrode to improve the efficiency of production and performance by allowing the lower electrode exposed part in the center of an acoustic lens concave part formed of resin to communicate with a case through a metal film formed by vapor deposition. SOLUTION: A case 10 is fixed a metal mold by an epoxy adhesive, a thermoplastic resin is poured therein, and block consisting of a piezoelectric element 1 and a damper material 4 is then inserted to form an acoustic lens 8. A lower electrode 3 is exposed to the bottom part of the concave part 9 of the acoustic lens 8. The case 10 is put in an evaporation device to deposit a metal film in the whole area including the bottom part of the acoustic lens concave part 9 and the front surface of the case by vapor deposition. According to this, the case 10 communicates with the lower electrode 3, and-current is carried from an electric signal source between a GND lead wire 13 drawn from the case 10 and an upper lead wire 7 to vibrate a piezoelectric element 1, whereby ultrasonic waves can be stably generated.
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