| 摘要 |
PROBLEM TO BE SOLVED: To provide a light beam form measuring apparatus capable of highly precise measurement without fine change of image sensing magnification when an attenuation filter of amount of light is set on and removed from an optical path in order to cope with light beams having various kinds of amount of light, as a first task. SOLUTION: In this light beam form measuring apparatus, a light beam is magnified with a magnification optical system, the magnified image is picked up with an image sensing element, and the form and the diameter of the light beam are measured by processing the picked-up image. The magnification optical system 2 is constituted of an infinite point correction optical system provided with an objective lens 21 and an imaging lens 22. An attenuation filter 6 of amount of light for adjusting amount of light is arranged between the lenses 21 and 21. When the filter is set on and removed from an optical path in order to cope with light beams having various kinds of amount of light, image sensing magnification does not generate fine change. As a result a light beam form measuring apparatus capable of highly precise measurement can be provided.
|
