发明名称 |
Cleaning apparatus for wheels of car, for semiconductor device manufacturing |
摘要 |
Cleaning apparatus for the wheels of a car used in a semiconductor manufacturing plant has a pair of endless belts that carry a dust trapping material on their outer surfaces. The belts turn against a wheel and thereby remove the dust.
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申请公布号 |
US6108846(A) |
申请公布日期 |
2000.08.29 |
申请号 |
US19980213457 |
申请日期 |
1998.12.17 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY |
发明人 |
CHANG, NICK;LEE, CHUNG-YEA |
分类号 |
B08B1/00;B08B7/00;B60S3/04;(IPC1-7):B60S1/66;B08B1/02;B08B5/04;B60S1/68 |
主分类号 |
B08B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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