发明名称 Cleaning apparatus for wheels of car, for semiconductor device manufacturing
摘要 Cleaning apparatus for the wheels of a car used in a semiconductor manufacturing plant has a pair of endless belts that carry a dust trapping material on their outer surfaces. The belts turn against a wheel and thereby remove the dust.
申请公布号 US6108846(A) 申请公布日期 2000.08.29
申请号 US19980213457 申请日期 1998.12.17
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY 发明人 CHANG, NICK;LEE, CHUNG-YEA
分类号 B08B1/00;B08B7/00;B60S3/04;(IPC1-7):B60S1/66;B08B1/02;B08B5/04;B60S1/68 主分类号 B08B1/00
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