Calibrating a RF integrated circuit sensor

摘要

The method uses a probe (20) of an integrated radio frequency circuit (50), including a determination stage using a network analyzer (90) and calibrating circuits for characteristics of the transmission lines (30,40) of the probe (20). The determination stage is realized by means of calibrating circuits (60,70) integrated on a silicon wafer (75,76). The calibrating circuits (60,70) include contacts (P1-P12) corresponding to their arrangement on radio frequency connection banks on the integrated circuit (50) to be tested and which are defined by their differing characteristic impedance (O,S,L,C1,C2) measurable from the contacts banks. A preliminary stage measures the values of the characteristic impedance's of calibrating circuits (60,70) by means of a material (80) previously calibrated with reference loads (83,84,85) calibrated by a licensed laboratory.