发明名称 |
Catadioptric reduction projection optical system and method |
摘要 |
A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
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申请公布号 |
US6108140(A) |
申请公布日期 |
2000.08.22 |
申请号 |
US19990246673 |
申请日期 |
1999.02.08 |
申请人 |
NIKON CORPORATION |
发明人 |
HASHIMOTO, SUMIO;SUENAGA, YUTAKA;ICHIHARA, YUTAKA |
分类号 |
G02B1/02;G02B17/08;G03F7/20;(IPC1-7):G02B17/00 |
主分类号 |
G02B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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