| 摘要 |
PROBLEM TO BE SOLVED: To impart sufficient tolerance to a parameter of a diffraction type optical parts by calculating a valuational function of an error endowment state, minimizing a combined valuational function added to the valuational function of a no error state and deciding a variable. SOLUTION: The state S0 is the no error state, and this valuational function is made E0. The state S1 is the state imparting the error +δi related to a suitable parameter Pi, and this valuational function is made E1. The state S2 is the state imparting the error -δi related to the same parameter Pi, and this valuational function is made E2. The valuational functions E1, E2,... related to the state initially imparting such an error are added to the valuational function E0 of the no error state, and the combined valuational function E is formed, and this is minimized, and a suitable variable value is imparted. That is, weight wk is multiplied by the valuational function, and they are added to each other, and the combined valuational function E=ΣwkEk is imparted. Then, a set of the optimum variable is obtained by minimizing the E, and the variable value realizing the minimum valuational function is obtained.
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