Method of adjusting relative positions of two objects by using diffraction grating and control apparatus therefor.,申请号EP19850300622-传众专利搜索

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发明名称	Method of adjusting relative positions of two objects by using diffraction grating and control apparatus therefor.
摘要
申请公布号	EP0151032(B1)	申请公布日期	1994.09.07
申请号	EP19850300622	申请日期	1985.01.30
申请人	NIPPON TELEGRAPH AND TELEPHONE CORPORATION	发明人	UNE, ATSUNOBU;IKI, MAKOTO;TAKEUCHI, NOBUYUKI;DEGUCHI, KIMIYOSHI
分类号	G03F9/00;(IPC1-7):G03B41/00	主分类号	G03F9/00
代理机构		代理人
主权项
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