Electrode plate, liquid crystal device and production thereof

摘要

An electrode plate is formed by a substrate and a plurality of patterned electrodes formed on the substrate. Each patterned electrode has a laminate structure including a first layer of nickel metal formed on the substrate and a second layer of copper formed thereon. The electrode plate may be prepared by a process including a step of etching such a multilayer metal electrode-forming film formed on a substrate by spraying an etchant downwardly and uniformly onto the substrate while rotating the substrate at a rotation speed sufficient to allow quick liberation of the etchant from the substrate. The metal electrodes can be formed with a good adhesion onto the substrate and with good accuracies of width and thickness. By incorporating the electrode plate as a pair of substrates sandwiching a liquid crystal, a liquid crystal device showing free from transmission delay and rounding of voltage waveforms can be provided.