发明名称 POSITIONING DEVICE FOR TABULAR WORK
摘要 <p>PROBLEM TO BE SOLVED: To position a tabular work in a non-contacting state without raising dust. SOLUTION: A positioning device has a plate 1 for floating provided with an upper plate 11 having air holes 11a, a lower plate 12, both side plates 13, an air chamber 14, etc.; a pin-up mechanism 2 provided with air cylinders 21, rods 22, supporting plates 23, work supporting pins 24, etc.; and a positioning device 3 provided with a linear guide section 32, support sections 33, arms 35 which are rotatably supported by pins 34, positioning pawls 36 having air blowing-out ports 36a, an air pipe system 37, etc. The positioning device positions a pin-upped work W in such a way that the device lowers the work W onto the plate 1, floats the work W to a heightδh1 from the plate 1, and supports the work W in the floating state. In addition, the device positions the work W by again floating the work W by an amountδh2 which is smaller than the amountδh1 by blowing down air from the positioning pawls 36. Therefore, the positioning device can position the work W in a non-contacting state without raising dust.</p>
申请公布号 JP2000232148(A) 申请公布日期 2000.08.22
申请号 JP19990032343 申请日期 1999.02.10
申请人 TABAI ESPEC CORP 发明人 TANAKA HIDEKI
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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