| 摘要 |
PROBLEM TO BE SOLVED: To eliminate defects such as generation of internal stress due to thermal distortion at a crystal blank plate constituting a crystal vibrating element by excessive heating, the fluctuation of a resonance frequency by the oxidation of an Ag layer constituting a pad electrode and the generation of stress inside of a crystal blank plate by the generation of the camber of a package at the time of thermo-compression bonding and fixing Au bumps formed on Ag pad electrodes provided at a crystal vibrating element to Au internal terminals within a ceramic package. SOLUTION: In this piezoelectric resonator which electrically and mechanically connects a piezoelectric vibrating element 1 to the inside of a surface mounted package 2 in a cantilevered state and connects Ag pad electrodes 16, 17 on one surface of the element 1 and Au metallized internal terminals 24, 25 on a bottom surface in the surface mounted package by the Au bumps 40, connection of the Au motallized internal terminals and the Au bumps is executed by a thermo-compression bonding method by low-temperature heating.
|
