Pre-ionization device for gas laser

摘要

The device has an elongated inner pre-ionization electrode (3a), an elongated dielectric tube (3b) about the inner electrode, an outer pre-ionization electrode (17) at a different electric potential from the inner electrode and at a distance so that a gap (14) is defined that is sufficient to form a barrier discharge region (15).- DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for a dielectric tube for an elongated inner pre-ionization electrode, for a laser system with a pre-ionization unit, for a gas discharge chamber for a gas discharge laser and for a pre-ionization unit