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发明名称
High resolution positive acting dry film photoresist
摘要
申请公布号
EP0848290(B1)
申请公布日期
2000.08.16
申请号
EP19970309966
申请日期
1997.12.10
申请人
MORTON INTERNATIONAL, INC.
发明人
KOES, THOMAS A.;BELTRAMO, GRIEG B.
分类号
G03F7/004;C08K5/42;C08L1/08;C08L33/00;C09D7/12;C09D101/08;C09D133/00;G03F7/039;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
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