| 摘要 |
A method for connecting an optical waveguide (5) and an optical semiconductor device (2) and an apparatus for connecting the same, capable of removing a working error and getting a high optical coupling coefficiency. The method consisting of the steps of: moving the optical semiconductor device (2) to the substrate (1) so as to overlap the pair of the first positioning marks (4a,4b) and the pair of the second positioning marks (6a,6b); obtaining an actual distance (L) from the outgoing surface to the pair of the second positioning marks (6a,6b), based on an image photographed by allowing the infrared ray to transmit through the substrate (1) and the optical semiconductor device (2); obtaining an error ( alpha ) between the actual distance (L) and a designed distance (Lo) previously set, by subtracting the designed distance (Lo) between the outgoing surface of the optical semiconductor device (2) and the pair of the second positioning marks (6a,6b) from the actual distance (L); moving the pair of the second positioning marks (6a,6b) relative to the pair of the first positioning marks (4a,4b) by a quantity equal to the error ( alpha ) so as to cancel the error ( alpha ); and jointing the optical semiconductor device (2) to the substrate (1). <IMAGE> |
