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发明名称
COOLING DEVICE OF SEMICONDUCTOR DIFFUSION APPARATUS
摘要
申请公布号
KR200193145(Y1)
申请公布日期
2000.08.16
申请号
KR20000006610U
申请日期
2000.03.09
申请人
ANAM SEMICONDUCTOR., LTD.
发明人
BAE, NAM HO
分类号
H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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