| 摘要 |
PURPOSE: An apparatus is provided to prevent bellows from leaking caused by a fragment of broken wafer. CONSTITUTION: An apparatus includes a hexagonal transfer chamber(12) placed in a transfer robot arm(10), process chambers(14) performing etching processes, and wafer loading/unloading chambers(16,18) fixed on inside of a transfer chamber, and a cassette moving up/down with an elevator. Slot valves(22) are placed between a transfer and process chambers and between a loading/unloading and transfer chambers A slot valve includes a gate door(24) opening/closing a slot gate(20), a shaft supporting a gate door, a driver(26) reciprocating a shaft to drive a gate door, and a bellows made of thin and elastic material to seal a reciprocating shaft tightly. A shaft and driver are located on a gate door. If a shaft moves up/down, a slot gate opens/closes through a gate door.
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