CAPACITOR OF SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A capacitor of semiconductor apparatus is to increase an effective area of the capacitor while maintaining a specific dielectric constant of a dielectric layer. CONSTITUTION: A semiconductor apparatus capacitor comprises a silicon substrate(20) as a first conductive semiconductor substrate; an impurity region(21) formed on the substrate; an interlayer dielectric(22) formed on the substrate and having a contact for exposing the impurity region; a tungsten plug(23) as a conductive plug burying the contact; a first and second storage electrode(24,25) consisting of a semi-sphere protrusion with irregular shape, formed on the insulation layer, and contacting the plug; a third storage electrode(26) consisting of a tungsten layer covering the second storage electrode; a dielectric layer(27) formed on a surface of the tungsten layer; and an upper electrode formed on the dielectric layer.