| 摘要 |
PURPOSE: An electrostatic microactuator with a shield film is provided to obtain a large generating power through forming the shield film preventing a transverse force caused by a moving body approaching stator. CONSTITUTION: A voltage shield film(50) is installed between comb shaped bodies(12,22) of a stator(10) and a moving body(20). Herein, an identified voltage is applied to the shield film and to the comb shaped body of the moving body. However, the voltages is applied to the comb shaped body of the stator are different from each other. Thus, the voltage shield film is arranged adjacent to the comb shaped body of the moving body than the comb shaped body of the stator. The voltage shield film is supported by anchors. Moreover, the voltage shield film is electrically connected to a base electrode.
|
