| 摘要 |
PROBLEM TO BE SOLVED: To prepare an ultra-fine particle thin film with electroconductivity and antireflective function, comprising a complex ultra-fine particle having a specific particle diameter composed of at least silicon oxide, tin oxide, or the like, and constituting an arrangement to make the thickness of the film containing the ultra-fine particles have a specific value. SOLUTION: An ultra-fine particle thin film 5 is formed on a glass substrate 3. The ultra-fine particle thin film 5 mainly comprises ultra-fine particles 1 and the ultra-fine particles 1 are of a mixture of an electroconductive component 2 and an antireflective function component 6. Tin oxide is used as the electroconductive component 2 and silicon oxide is used as the antireflective function component 6. The volume ratio of tin oxide/silicon oxide in the film is >=0.1 and <=0.5. The ratio of the electroconductive component 6 in the ultra- fine particles 1 is >=1 wt.% and <=50 wt.%. Since the average particle diameter of the ultra-fine particles is 0.05-0.1 μm, the thickness of the ultra-fine particle thin film 5 is tolerably 0.05-0.1 μm. The distance between the ultra-fine particles is preferably <=0.05 μm. |
