| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning method and an ultrasonic cleaner, capable of surely preventing a cleaning unevenness of a body to be cleaned. SOLUTION: In this ultrasonic cleaning method, ultrasonic waves are radiated in a detergent L from downward to upward of a cleaning bath 52, so that a body to be cleaned (wafer) W immersed in the detergent L is cleaned, and in a state that the body W is retained vertically in the detergent L by a wafer board 2, the structure is made so that reciprocal movement is made in a length of at least 1/4 times the wavelength of the ultrasonic waves, so that a high vibration part and a low vibration part of ultrasonic vibrations are uniformly abutted on the body W.
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