发明名称 METHOD FOR COATING SUBSTRATE WITH VISCOUS FLUID
摘要 PROBLEM TO BE SOLVED: To reduce the amount used of a resist soln. while enhancing productivity when the resist soln. is applied to a substrate. SOLUTION: A resist solnl. is dripped on the surface of one glass substrate 1 along the one side edge 1a in a line form and one side edge 4a of other glass substrate 4 is applied to one side edge 1a of one glass substrate 1 and both glass substrates 1, 4 are superposed one upon another in a state closing a book to diffuse the resist soln. 3 along the surfaces of both substrates 1, 4. Since the resist soln. 3 can be applied to two glass substrates 1, 4, productivity can be enhanced.
申请公布号 JP2000225372(A) 申请公布日期 2000.08.15
申请号 JP19990026627 申请日期 1999.02.03
申请人 ROHM CO LTD 发明人 TANAKA MASASHI
分类号 B05D1/40;B05C1/02;B05C11/02;B05C11/08 主分类号 B05D1/40
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