| 摘要 |
PROBLEM TO BE SOLVED: To reduce deformation of a tip in a probe pin so as to stably recognize an image by covering the tip of the probe pin with Pt of a film thickness of a specific dimension or more. SOLUTION: In a probe pin, a conductive film is arranged on the surface of acicular single crystal with a thickness ranging from severalμm to 100μm and a length ranging from several mm to several hundredsμm, and a Pt film is arranged in the tip part. The Pt film arrangement area ranges about 20-200μm from the front edge part, while a thickness of the Pt film about 3μm or more, and in general, it may be about 5μm or less. For forming the Pt film only in the tip part of the acicular single crystal, the part excepting the part for the Pt film is masked by a resist or the like, and then, the film is formed by a plating method, and subsequently, the masking material is removed. Alternatively, the whole of the single crystal is covered with a Pt film, and then, an unnecessary part other than the tip part is removed by etching. The Pt film formed by a plating method is provided with Knoop hardness of about 270-400, and expected affect can be provided.
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