| 摘要 |
PROBLEM TO BE SOLVED: To reduce stand-by power at the time of standby of a vacuum pump by using an adsorption pump utilizing the adsorption material such as zeolite as the vacuum pump of a vacuum device, and regenerating an adsorbing material utilizing exhaust heat, combustion heat of a waste product, night power, and the like. SOLUTION: An adsorption pump composed of tanks 20, 30 in which adsorbing materials (zeolite, silica gel, and the like) 21, 31 are housed, is disposed by connecting in parallel to a vacuum device 1. Valves 24, 26 in pips 23, 27 disposed continuously to one side tank 20 cooled by a coolant 6 are opened, and thereby, air in the vacuum device 1 is adsorbed on an adsorbing material 21 in the tank 20 bypassing pipes 2, 7 and the pipes 27, 23. In the case where adsorbing function of the adsorbing material 21 is reduced, the valve 26 is closed, the valves 36, 34 are opened to adsorb air in the vacuum device 1 on the adsorbing material 31 in the tank 30. The adsorbing material 21 in the tank 20 is regenerated by heating a heater with midnight power.
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