EPITAXIAL DEVICE USING MOLECULAR BEAM

摘要

PROBLEM TO BE SOLVED: To provide an epitaxial device using a molecular beam, and having a shutter structure with higher sealability in the closed state of the shutter. SOLUTION: This epitaxial device has a molecular beam cell 1 capable of heating the outer periphery part of a crucible storing a solid raw material by a heater, and carries out the supply and the shielding of the molecular beam of the raw material by the opening and closing of a shutter arranged between the molecular beam cell and a substrate used for growing. A partition board 12 capable of spatially isolating another molecular beam cell and the growing position of the substrate in the state of the opening part of the crucible of the molecular beam cell closed by the shutter, is installed.