发明名称 |
FLATNESS MEASURING METHOD AND MEASURING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To reduce work in measurement of flatness and improve measurement accuracy. SOLUTION: A guide rail 3 is fixed on a metal surface 1 of a measuring object by a support member 2 consisting of magnet supporting both ends of the guide rail 3. Flatness of metal surface 1 is measured with a laser type displacement meter 5 provided movably along the guide rail 3. With this method, flatness measurement becomes possible with ease and high accuracy even in the case the measuring object surface is facing downward.
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申请公布号 |
JP2000227320(A) |
申请公布日期 |
2000.08.15 |
申请号 |
JP19990026720 |
申请日期 |
1999.02.03 |
申请人 |
TOSHIBA CORP |
发明人 |
HARADA SHIGERU;TAKEDA KAZUHIRO |
分类号 |
G01B11/30;G01B21/30;(IPC1-7):G01B11/30 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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