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摘要
申请公布号
JP3077160(B2)
申请公布日期
2000.08.14
申请号
JP19900107858
申请日期
1990.04.24
申请人
发明人
分类号
C23C14/02;C23C14/14;C23C14/20;C23C18/20;H05K9/00;(IPC1-7):C23C18/20
主分类号
C23C14/02
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