发明名称 MANUFACTURE APPARATUS FOR DISPLAY
摘要 PROBLEM TO BE SOLVED: To reduce cost by facilitating the renewal of equipment, and also to simplify and downsize the equipment. SOLUTION: A manufacturing apparatus 51 constitutes a manufacture process 51 for a cell process of processing and laminating the array substrate and the facing substrate of a liquid crystal display. The manufacture apparatus 51 is provided with a first carrier M1 and a second carrier M2. Each carrier M1 and M2 is provided with carrier robots R1 and R2 and sliders S1 and S2 to drive these carrier robots R1 and R2 on a straight line respectively. The apparatus is provided with a plurality of unit process equipment, surrounding the first and second carriers M1 and M2. The carriage robots R1 and R2 carry substrates in and out of each process unit and carry them.
申请公布号 JP2000223548(A) 申请公布日期 2000.08.11
申请号 JP19990019805 申请日期 1999.01.28
申请人 TOSHIBA CORP;TOSHIBA ELECTRONIC ENGINEERING CORP 发明人 NONAKA TOSHITAKA
分类号 H01L21/677;G02F1/13;G02F1/1339;H01L21/68;(IPC1-7):H01L21/68;G02F1/133 主分类号 H01L21/677
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