摘要 |
PROBLEM TO BE SOLVED: To perform miniaturization and to improve impact resistance. SOLUTION: This crystal vibrator 10 is provided with a vibrator substrate 20 where a pair of vibration electrodes are formed, a base substrate 30 for supporting the vibrator substrate 20 and a lid substrate 40 for covering the vibrator substrate 20. The vibrator substrate 20, the base substrate 30 and the lid substrate 40 are constituted of flat substrates, anode-joined and airtightly sealed. Then, the vibrator substrate 20 is provided with a vibrator piece where first and second vibration electrodes are formed and a frame part thicker than the vibrator piece for supporting the crystal vibrator piece where a first wiring electrode connected to the first vibration electrode is formed almost over the entire surface of one surface and a second wiring electrode connected to the second vibration electrode is formed almost over the entire surface of the other surface. On the corner part side wall of the frame part, first and second external electrodes respectively continued to the first wiring electrode and the second wiring electrode are formed.
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