| 摘要 |
PURPOSE:To form a flat film having high accuracy even if the width and interval of ruggedness are large by exerting pressure to the film in the stage of laminating the film further onto a substrate having the ruggedness. CONSTITUTION:A 'Permalloy(R)' film 12 and alumina film 15 of a prescribed pattern is formed on the substrate 11 and a polyimide resin film 18 is coated thereon. The resin film 18 is heated and cured while said film is pressed by a flat metallic plate 20 subjected to coating for stripping and if the metal 20 is stripped thereafter, the resin film 18 having the flat shape is formed even with the ruggedness having the large width and intervals. The insulation breakdown arising from a decrease in the thicknesses of the 'Permalloy(R)' film 12 and conductor coil ends is prevented when a conductor coil pattern 16 is formed on such resin film. |
