MIRROR STRUCTURE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce a mirror plane in a desired place and in a desired direction on a waveguide substrate with high accuracy by forming a groove filled with a polymer material in a part of the waveguide in such a manner that at least one plane in the polymer material in the groove is formed as a reflection plane at a specified angle to the substrate. SOLUTION: A groove 10 is formed by, for example, a dry etching method in the region where the mirror structure is to be formed. Then a polymer material as an org. material such as a UV-curing material is poured into the groove 10. The groove 10 filled with the polymer material is exposed to light by using an exposing means 1 in the incident direction according to the angle of the mirror plane 106. By using the exposing means 1 to expose the photosensitive material 105 to the light through a varied optical path in the oblique direction to form the mirror plane, the mirror structure to convert the optical path can be produced at any position in a desired direction in the waveguide substrate 101 with high accuracy.