| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a resonator mirror for a hexagonal-system nitride-based semiconductor laser element whose flatness is good. SOLUTION: In this semiconductor laser element, a substrate 10 is provided, a laminated body 6 which is formed on the substrate 10 and which is composed of a hexagonal-system nitride-based semiconductor is provided, and a stripe- shaped optical waveguide 17 formed in the laminated body is provided. The stripe-shaped optical waveguide 17 and an element end face constitute an optical resonator. The semiconductor laser element is featured in such a way that the rear side of the substrate 10 in the element end face is provided with a groove part 11 so as to be parallel with the end face at least in the upper part of the stripe-shaped optical waveguide 17, that a cavity 14 is provided in the laminated body in the lower part of the stripe-shaped optical waveguide 17, and that the nitride-based semiconductor continued from the upper part of the cavity 14 is provided on the side of the cavity 14.</p> |
