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发明名称
VERTICALLY-STACKED PROCESS REACTOR AND CLUSTER TOOL SYSTEM FOR ATOMIC LAYER DEPOSITION
摘要
申请公布号
EP1025278(A1)
申请公布日期
2000.08.09
申请号
EP19980943425
申请日期
1998.08.26
申请人
GENUS, INC.
发明人
GADGIL, PRASAD, N.;SEIDEL, THOMAS, E.
分类号
C23C16/44;C23C16/455;C23C16/54;C30B25/12;C30B25/14;H01L21/205;(IPC1-7):C23C16/00;H01L21/00
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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