发明名称 |
Novel polymers and photoresist compositions |
摘要 |
The present invention provides novel polymers and chemically-amplified positive-acting photoresist compositions that contain such polymers as a resin binder component. Preferred polymers of the invention include one or more structural groups that are capable of reducing the temperature required for effective deprotection of acid-labile moieties of the polymer. |
申请公布号 |
EP0915382(A3) |
申请公布日期 |
2000.08.09 |
申请号 |
EP19980116532 |
申请日期 |
1998.09.02 |
申请人 |
SHIPLEY COMPANY LLC |
发明人 |
TAYLOR, GARY N.;SZMANDA, CHARLES R. |
分类号 |
C08F220/16;C08F220/18;C08K5/42;G03F7/004;G03F7/039;H01L21/027 |
主分类号 |
C08F220/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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