发明名称 Device for the transfer of an object between at least two locations
摘要 A device for transferring an object between at least two locations with a gripper which grips the object at a handle element after it approaches the object with gripper elements has the aim of preventing deformation or destruction of the object during the approach of the gripper. This should minimize particle generation resulting from firm holding. The gripper has a sensor for detecting the object and its distance during approach, wherein the time at which the object is detected defines the determination of the remaining approach path for a controlled approach and the start of the gripping process.
申请公布号 US6099059(A) 申请公布日期 2000.08.08
申请号 US19980158559 申请日期 1998.09.22
申请人 BROOKS AUTOMATION GMBH 发明人 SCHULTZ, KLAUS;WEISBACH, VOLKER;GEY, BERND;MAGES, ANDREAS
分类号 B25J15/08;B65G47/90;B65G49/07;H01L21/673;H01L21/677;(IPC1-7):B25J19/02;B65G65/00 主分类号 B25J15/08
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