| 摘要 |
PROBLEM TO BE SOLVED: To prevent the transmission of heat from a member inside a vacuum pump device such as a turbine molecular pump or the like, e.g. from the surface of a blade such as a rotor blade or a stator blade into the blade. SOLUTION: This device is constructed in such a manner that on the blade 12 of the rotor blade 62 or the stator blade 72 of a turbine molecular pump device exposed to pump compressed heat or heat from a heater, a first layer 13 made of a heat bad conductor covering is formed, and a second layer 14 made of a heat good conductor covering is formed on the surface of the first layer 13. By the covering of this double-layer structure, the transmission of heat from the second layer 14 to the blade 2 is prevented. Thus, the surface of the blade 12 of the rotor blade 62 or the stator blade 72 is prevented from being cooled, and a semiconductor product stuck/deposited on the blade surface is smoothly sublimated. |
