| 摘要 |
PROBLEM TO BE SOLVED: To provide a working fluid supply device for a wire saw which can prevent the reverse flow of a processing liquid and control the temperature of the working fluid accurately. SOLUTION: A reverse flow prevention valve 102 is provided to the piping 84 for connecting a working fluid tank 46 of a wire saw with a buffer tank 40 and the reverse flow of the working fluid to the buffer tank 40 is prevented by the reverse flow prevention valve 102. Thereby, the amount of the working fluid in the processing liquid tank 46 is stabilized and the temperature of the working fluid can be controlled accurately by a heat exchanger 50. The reverse flow prevention valve 102 is arranged on the position where the flow route of the working fluid is formed in a horizontal direction. Thereby, the block of the piping 84 by the solid in the working fluid can be prevented. |
