BEAM TRANSMISSION PART OF ION IMPLANTATION APPARATUS

摘要

PURPOSE: A beam transmission part of an ion implantation apparatus is to suppress occurrence of secondary electrons generated by scattered ion beams being collided with side walls of beam transmission part. CONSTITUTION: A beam transmission part(24) of an ion implantation apparatus which receives an ion beam(38) from an ion beam source part(20) and allows the received ion beams to be transmitted to a beam implantation part, the beam transmission part comprises: a first lens(30) disposed in the front of the beam transmission part, for concentrating the transmitted ion beams thereto; an accelerator(28) disposed at the back of the first lens, for accelerating the ion beams concentrated by the first lens; a second lens(32) disposed at the end of the beam transmission part, for concentrating the accelerated ion beam to the beam implantation part; and a filter(34) disposed between the first lens and the accelerator, allowing the ion beams passing through the first lens to be concentrated to the accelerator.