发明名称 METHOD OF PROCESSING SEMICONDUCTOR TECHNOLOGICAL PRODUCT
摘要 <p>PROBLEM TO BE SOLVED: To enable an electronic circuit conductor structure formed on a product to be formed at a low cost and easily handled meeting requirements such as a reduction in its size by a method wherein an adhesive material layer is provided on the surface which undergoes processing steps, and a transfer device is provided on the adhesive material layer so as to be connected to the surface. SOLUTION: When the rear of a product 1 where a large number of electronic circuits are formed on its front surface is subjected to a process where it is thinned, a double-sided adhesive foil 3 is laminated on the front 2 of the product 1. A transfer device 4 is provided on the double-sided adhesive foil 3. In this state, the rear of the product 1 is processed to be thin. Thereafter, a double-sided adhesive foil 5 is deposited on the rear of the product 1. In this state, the product 1 is connected to the transfer devices 4 and 5 on its front and rear respectively. Then, the front 2 of the product 1 is to be processed, the transfer device 4 is removed from the front 2, and then the double-sided adhesive foil 3 is removed.</p>
申请公布号 JP2000216115(A) 申请公布日期 2000.08.04
申请号 JP19990315249 申请日期 1999.11.05
申请人 KONINKL PHILIPS ELECTRONICS NV 发明人 ANKER JOACHIM;DICHTE OLAF;BURMEISTER FRANK
分类号 H01L21/683;H01L21/02;H01L21/301;H01L21/66;H01L21/68;H01L21/78;(IPC1-7):H01L21/301 主分类号 H01L21/683
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