| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage of a substrate by abnormal discharge at end surfaces and edges of a lower electrode in manufacturing of a liquid crystal display device or the like. SOLUTION: An outer-peripheral insulating member 3 is provided contacting side-surfaces of a lower electrode 2. The distance between lower surface of a substrate 1 to be processed, placed on the lower electrode 2, and upper surface of the outer peripheral insulating substance 3 is kept at 0.1 mm or larger and 1.0 mm or smaller. With this configuration, the space surrounded by the substrate 1 to be processed, the lower electrode 2, and the outer peripheral insulating substance 3, is reduced to suppress the infiltration of radical components related to isotropic etching, and occurrence of abnormal discharge due to electric field concentration is prevented.
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