| 摘要 |
PROBLEM TO BE SOLVED: To conduct a precise, automated and efficient position adjusting. SOLUTION: The device is constituted of a light generating means 2 which generates light beams, a base member 1 on which the means 2 is positioned at a prescribed location and set, a reflector 13 which is arranged at the location opposite to the means 2 on the member 1 and reflects the light beams emitted from the means 2, and a photodetector which receives diffracted light beams by a diffraction element provided on the member 1 and converts the beams into electric signals. Moreover, the device is provided with a reference table 5 which mounts the member 1 and moves in the horizontal direction, a setting means 16 which sets the reflector 13 on the member 1, and an image processing means 11 which receives the reflected light beams from the reflector 13 and conducts the image processing. Based on the output of the means 11, a position adjustment of the reflector 13 on the member 1 relative to the means 2 is performed and the reflector 13 is fixed onto the member 1.
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