SUBSTRATE FOR SOLAR BATTERY, ITS MANUFACTURE AND THIN FILM SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To reduce the cost of a solar battery by eliminating the necessity of forming an intermediate layer between a substrate for the solar battery and a silicon semiconductor when manufacturing the solar battery by using the conductive ceramic sintered material for the substrate. SOLUTION: A thin film solar battery consists of a substrate 11, a silicon semiconductor 21, a surface electrode 31, and an anti-reflection film 41. The substrate 11 is made of the ceramic sintered material, which is mainly made of SiC. The substrate is provided with a terminal section to be connected to a lead wire for delivering the power collected in the terminal section outside the substrate. The silicon semiconductor 21 is a thin film silicon semiconductor having a pn junction which consists of a p-type silicon layer 23 on the substrate side and an n-type silicon layer 22 on the surface side and is disposed on the surface of the substrate 11. The surface electrode 31 is a comb-like electrode in contact with the n-type silicon layer 22 of the silicon semiconductor 21 and is disposed on the surface of the silicon semiconductor 21. The anti-reflection film 41 is a film disposed on the surface of the surface electrode 31 and is made of SiO2.