| 摘要 |
PROBLEM TO BE SOLVED: To be able to prevent a probe needle from oxidation even for checking by using a large current by supplying inert gas to a contact part from the perpendicular direction corresponding to an electrode forming plane to maintain the contact part of a tip part of the probe needle with an electrode for outer connection of a substance to be measured in a non oxidized atmosphere while checking. SOLUTION: A probe card 6 has an aperture at the central part, and a contact part of an electrode 4 for outer connection of a semiconductor device 3 as a checking objective with a probe needle 5 is located in the region corresponding to the aperture. And a nozzle port 8 is so provided as the aperture which radiates the inert gas to direct downwards. At the checking for the semiconductor device 3 including large current measurement, the inert gas is supplied from the above perpendicular direction of the semiconductor device 3 to the contact part of the electrode 4 for outer connection and the probe needle 5. As the result, the inert gas is effectively supplied to the contact part and the tip of the probe needle 5 is prevented from oxidation because the contact part becomes in a stable non oxidized circumstance.
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