发明名称 SEMICONDUCTOR DEVICE AND ITS TESTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can test together with a replica circuit and a chip main body even when a voltage generating circuit is not mounted on the same chip, and can make real speed measurement of a chip in a wafer state. SOLUTION: In the semiconductor device which has a replica circuit 12 of a critical path and in which a voltage generating circuit is not mounted on a chip, there are provided a buffer 15 and an output pad T12 so as to take out an output of the replica circuit 12 to the outside, and further there is provided an output pad T11 for fetching out an output of a phase and detection circuit 13 integrated within the same chip IC. Thus, when a chip simplex is tested for evaluation, it is possible to observe operating characteristics such as operation frequencies, etc., of the replica circuit 12 from externally and to judge whether or not a critical path delay of a chip main body circuit 11 can be reproduced by operations of the replica circuit 12 constituted at the time of manufacturing the chip IC by comparing the observation results with the operating characteristics of the chip main body.
申请公布号 JP2000214221(A) 申请公布日期 2000.08.04
申请号 JP19990012380 申请日期 1999.01.20
申请人 SONY CORP 发明人 SENOO KATSUNORI;SEKI TAKEHIRO;HASHIGUCHI AKIHIKO
分类号 H01L21/822;G01R31/28;G01R31/319;H01L27/04;(IPC1-7):G01R31/28 主分类号 H01L21/822
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