| 摘要 |
PROBLEM TO BE SOLVED: To provide a high accuracy visual inspection system which can prevent risks, such as data loss caused by a failure or the like during a visual inspection process requiring long time. SOLUTION: An image processing unit 9 has a plurality of channels, and the CPU 1 checks each function at each predetermined time or for each predetermined inspection unit. At this time, if a failure occurs during the visual inspection process, the inspection results thus far are stored in the memory 8, and the inspection is terminated. If the occurrence location of failure is the image processing unit 9, the channel of the image processing unit 9 where the failure has occurred is disconnected, and the processing is made in other channels. |
