发明名称 |
HEAT TRANSFER MECHANISM UNDER VACUUM, AND VACUUM TREATMENT DEVICE PROVIDED WITH THE HEAT TRANSFER MECHANISM |
摘要 |
PROBLEM TO BE SOLVED: To provide a heat transfer mechanism under vacuum, which is capable of sufficiently ensuring the heat transfer between a rotating body to be rotated under vacuum and a fixed part opposite to the rotating body, and a vacuum treatment device provided with the heat transfer mechanism. SOLUTION: A heat transfer mechanism transfer the heat between a rotating body 5 and a fixed part 10 under vacuum. A plurality of first concentric cylindrical members 8 around the axis O1 of rotation of the rotating body 5 are protruded from the rotating body 5. A plurality of second concentric cylindrical members 9 around the axis O1 of rotation of the rotating body 5 are protruded from the fixed part 10 so as to be inserted in annular gaps between the first concentric cylindrical members 8. The first concentric cylindrical members 8 and the second concentric cylindrical members 9 are combined with and opposite to each other.
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申请公布号 |
JP2000212736(A) |
申请公布日期 |
2000.08.02 |
申请号 |
JP19990014474 |
申请日期 |
1999.01.22 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
KURIYAMA NOBORU;TAKIZAWA HIROTSUGU;KOGURE KIMIO;INAO YOSHIAKI;ITO AKIHIKO;KAWAMATA YOSHIO;AOYAMA YUJI |
分类号 |
B01J3/00;C23C14/34;(IPC1-7):C23C14/34 |
主分类号 |
B01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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