| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet etching completion point detecting device which is capable of correctly detecting the wet etching completion point. SOLUTION: A wet etching completion point detection device detects the wet etching completion point from the change in the wavelength distribution spectrum to be outputted from a light detection element 2. Relating to this device, a turntable R is rotated integral multiple times, and the trigger signal at which the signal is read integral multiple times from a specified region of the light detection element 2 synchronous with the rotation is given to a motor drive circuit 5 and a light detection element drive circuit 3 to suppress the variance in the data to be finally obtained from the light detection element 2 attributable to the flickering of the rotation of the turntable R, and to correctly detect the wet etching completion point.
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