发明名称 MACHINING METHOD AND ITS DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a machining method and its device capable of realizing uniform laser beam machining having high dimensional precision without prolonging a machining time. SOLUTION: A trigger generating circuit 22, in which a driving trigger is generated with a repeating frequency proportional to the synthetic transfer speed of the movable part of a motor 14 based on a synchronizing signal generated from a linear encoder 16 of the driving motor (linear servomotor) 14, is provided, and the driving trigger from the trigger generating circuit 22 is inputted into the external trigger input terminal of a laser driving circuit 18. A laser beam 17 is driven based on the driving trigger outputted with the frequency proportional to the synthetic transfer speed of the movable part of the motor 14 in at least the area where the transfer speed of a placing pedestal 11 varies when a work 10 is machined.</p>
申请公布号 JP2000210782(A) 申请公布日期 2000.08.02
申请号 JP19990034871 申请日期 1999.02.12
申请人 RICOH MICROELECTRONICS CO LTD 发明人 KINOSHITA SHINGEN;KOBAYASHI TAKESHI
分类号 B23K26/00;B23K15/00;B23K26/08;H01L21/027;(IPC1-7):B23K26/00 主分类号 B23K26/00
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