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经营范围
发明名称
Deposition of a thin film on a substrate using a multi-beam source
摘要
申请公布号
EP0839925(A3)
申请公布日期
2000.08.02
申请号
EP19970308661
申请日期
1997.10.29
申请人
APPLIED MATERIALS, INC.
发明人
SCHWEITZER, MARC O.;CHIN, BARRY L.;RAAIJMAKERS, IVO J.
分类号
C30B23/08;C23C14/24;C30B23/02;C30B23/06;H01L21/203;(IPC1-7):C23C14/24
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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